Vacuum Control Base Module

The base for all operations common to both sputter and carbon coating. Slim and low-profiled, this unit powers either the Sputter Coater or Carbon Coater Module - or both! (Vacuum Control Unit serves no function by itself.)

Unlike other units, cooling is seldom required but water connections are present if needed; fine control needle valve on front panel; inlet for low pressure gas at rear; 0.001 vacuum meter range (Pirani gauge); vacuum pump connections at rear. Optional Quartz Crystal Thickness Monitor available.

SPI-Module Vacuum Control Unit features:

• 0-0.1 atmosphere vacuum gauge.
• Precision bleed valve for argon or other gases.
• 1/4" thick implosion proof Pyrex^® chamber.
• 4"H x 18-3/4"W x 12-3/8"D.
• 110 Volts