SPI Supplies Shelf for PPIII Solid State Etcher
SPI Supplies Quartz Shelf for PPIII Solid State Etcher
SPI Supplies Quartz Shelf for PPIII Solid State Etcher
Material Quartz
Item11009Q-SHELF-AB
AvailabilityIn Stock
$450.00
SPI Supplies Pyrex Shelf for PPIII Solid State Etcher
SPI Supplies Pyrex Shelf for PPIII Solid State Etcher
Material Pyrex
Item11009-SHELF-AB
AvailabilityIn Stock
$265.98

The shelf provides a convenient surface for your sample placement, having a number of holes to aid in gas flow. The shelf brings samples up to mid height and provides a smooth flat surface. (4"x6").

The Pyrex shelf should not be used in gas environments that produce fluorine radicals (CF4, CHF3, etc). For those gasses, use the quartz shelf (11009Q-SHELF-AB).

The Quartz shelf is suggested for use in environments that produce fluorine radicals (CF4, CHF3, etc). For other gasses, the Pyrex shelf (11009-SHELF-AB) may be more appropiate.