150-2DUTC mounted on JEOL 3/8" (9.5 mm) round mounts x 9.5 mm high

General Purpose - High Precision

A precision, holographic pattern providing accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.

Period: 144 nm pitch, two-dimensional array. Accurate to +/- 1 nm. Refer to calibration certificate for actual pitch.

Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated.