Pyrex Inner Chamber for Plasma Prep II and Plasma Prep III Systems
Replacement Pyrex Inner Chamber
For Plasma Prep III and Plasma Prep II Systems
Inner chamber size: 4” diameter and 5.75”, nominal.
Pyrex chambers are suggested for use with process gasses O2, N2, Ar and other gasses which do not readily react with glass. For process gasses such as CF4 and CCl3 we would recommend our Quartz Inner Chamber.
We suggest also changing the O-ring when getting a new inner chamber.