Model 301BE / 292UTC

High Magnification, High Resolution Calibration Tool

• Instruments: AFM, SEM, Auger and FIB.
• Pitch: 292 nm pitch.
• Line Height: 30nm.
• Feature: One-dimensional grating.
• Material: Titanium lines on Silicon wafer.
• Size: 3 x 4mm.

Model 301BE is non-traceable Calibration Reference
Model 292UTC is Traceable, Certified Standards